Introduction to microelectronic fabrication solution manual pdf

It is not to be confused with Epistaxis. This article needs additional citations introduction to microelectronic fabrication solution manual pdf verification. Please help improve this article by adding citations to reliable sources.


Unsourced material may be challenged and removed. Epitaxy refers to the deposition of a crystalline overlayer on a crystalline substrate.

The overlayer is called an epitaxial film or epitaxial layer. It can be translated as “arranging upon”.

Epitaxial films may be grown from gaseous or liquid precursors. Because the substrate acts as a seed crystal, the deposited film may lock into one or more crystallographic orientations with respect to the substrate crystal. If the overlayer either forms a random orientation with respect to the substrate or does not form an ordered overlayer, it is termed non-epitaxial growth.

Homoepitaxy is a kind of epitaxy performed with only one material, in which a crystalline film is grown on a substrate or film of the same material. This technology is used to grow a film which is more pure than the substrate and to fabricate layers having different doping levels.

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